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Technology at the highest level

Process equipment in clean rooms must meet high standards of quality and durability. At the same time, they must be economically efficient and easy to manage. The robots from Isel ROBOTIK are tailored individually to the profile required for handling wafers and substrates in the semiconductor industry. For more than ten years, Harmonic Drive® Gear Units have been integrated into these wafer handlers, from European production operating worldwide in many wafer processing cells, sorters and inspection plants.

HFUS

Compact with largest hollow shaft

HFUS Series Units are available in nine sizes with gear ratios of 30, 50, 80, 100, 120 and 160:1 offering repeatable peak torques from 9 to 1840 Nm.

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Tilt resistant output bearing enables space saving design solutions

The output bearing with high tilting rigidity in the Harmonic Drive® HFUS-2UH Series Units enables direct attachment of high payloads without any further support and thus permits simple and space saving design solutions. The HFUS-2UH Units are fully sealed with a large hollow shaft diameter for feeding through supply lines, shafts or cables for further drive systems.